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Structural evolution of nanoporous ultra-low k dielectrics under voltage stress
Structural evolution of nanoporous ultra-low k dielectrics under voltage stress
2013
Archana Raja
Thomas M. Shaw
Alfred Grill
Robert Laibowitz
Tony F. Heinz
Keywords:
Nanoporous
Analytical chemistry
Dielectric
Voltage
Materials science
structural evolution
Optoelectronics
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