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Local Stochiometry Distortions in a Rotatable Magnetron Sputter Source measured by True 2D Imaging Spectroscopy
Local Stochiometry Distortions in a Rotatable Magnetron Sputter Source measured by True 2D Imaging Spectroscopy
2005
Till Wallendorf
Swen Marke
Falk Milde
Keywords:
Cavity magnetron
Sputtering
Analytical chemistry
Imaging spectroscopy
Materials science
Optoelectronics
Correction
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