High-Q near-visible, air-clad, and thin-film SiN microresonator

We demonstrate high quality factor (high-Q) air-clad optical microresonator in a thinfilm LPCVD-SiN, with loaded quality factor of 1.55 M at the near visible wavelength, suitable for interaction with Rb atoms for single atom detection. This record is achieved with no chemical mechanical polishing or high-temperature post-processing, enabling future fully integrated devices with optoelectronic circuitry.