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Novel RIE-process for high quality InP-based waveguide structures
Novel RIE-process for high quality InP-based waveguide structures
1995
Y.S. Oei
Lh Spiekman
Fh Groen
Ingrid Moerman
E.G. Metaal
J.W. Pedersen
Keywords:
Waveguide
Electronic engineering
Materials science
Optoelectronics
Correction
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