Nanoimprint mold blank, nanoimprint molds and methods for their preparation

The present invention includes a glass substrate, a nanoimprint mold blank including a hard mask layer formed on the glass substrate, wherein the hard mask layer contains chromium (Cr) and nitrogen (N), Cr content of from 45~95at%, a 5～55At% the content of N, the total content of Cr and N is not less than 95 at%, 5 nm thickness of the hard mask layer is 1.5nm or more less than relates nanoimprint mold blank.