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The effect of laser irradiation on the structural and electrical properties of the surface of silicon
The effect of laser irradiation on the structural and electrical properties of the surface of silicon
1976
V. O. Zuev
V. G. Litovchenko
G. O. Sukach
M. M. Torchun
Keywords:
Materials science
surface
Electron diffraction
Irradiation
laser damage
Solid-state physics
Optoelectronics
Laser
Crystal structure
Silicon
Correction
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