Optical properties of a-Si:H and a-SixC1−x:H films prepared by glow-discharge deposition☆

Abstract Effects of hydrogen, annealing, rehydrogenation and doping with P or B of glow-discharge amorphous silicon films on the optical properties are discussed. Definition of optical gap is also discussed. And direct evidence of reconstruction with annealing of films are shown. GDa-Si x C 1−x : H are briefly compared with GDa-Si:H.