Mathematical Modeling of the Fabry-Perot Interferometer Based on Silicon Plates for Application in Microfluid Sensor Devices

In the Mathcad 15 software environment, a 4-mirror Fabry-Perot interferometer for use as a refractive index sensor was simulated. The transmission spectra for various analytes and gaps between silicon wafers are considered and calculated. Optimal areas of maximum sensor sensitivity were determined. As a result of the optimization, sensitivity to a change of the refractive index of up to 1900 nm / RIU was obtained. The perspective of using such a sensor in microfluidic devices is shown.