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P‐62: Study on the mechanism of Block Mura in the ITO developing process via utilizing CFD simulation
P‐62: Study on the mechanism of Block Mura in the ITO developing process via utilizing CFD simulation
2019
Xiaobao Li
Zhihai Zhang
Cheng Chen
Liu Zhaofan
Yangsik Youn
Junsheng Chen
Seungkyu Lee
Keywords:
Mura
Mechanical engineering
cfd simulation
Computer science
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