Quadrupole mass spectrometer for residual gas analysis and SIMS application

A combined secondary ion optics has been developed which includes both the ion source for residual gas analysis and the secondary ion optics for Secondary Ion Mass Spectrometry (SIMS). The change from one mode to the other can be done by changing only the electric connections without venting the vacuum chamber. The presented combination of the two methods allows the interpretation of SIMS spectra with higher reliability.