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J161013 Piezoelectric thin-film MEMS energy harvesters of stainless steel cantilevers
J161013 Piezoelectric thin-film MEMS energy harvesters of stainless steel cantilevers
2013
Yuichi Tsujiura
Eisaku Suwa
Fumiya Kurokawa
Hirotaka Hida
Isaku Kanno
Keywords:
Thin film
Cantilever
Composite material
Microelectromechanical systems
Materials science
Piezoelectricity
Optoelectronics
piezoelectric thin films
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