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Modeling and alleviating electrostatic instability in a MEMS vertical comb drive using a progressive linkage.
Modeling and alleviating electrostatic instability in a MEMS vertical comb drive using a progressive linkage.
2005
Jessica R. Bronson
Gloria J. Wiens
James J. Allen
Keywords:
Instability
Electrostatics
Miniaturization
Microelectromechanical systems
Mathematical model
Control engineering
Electronic engineering
Comb drive
Engineering
Electrical engineering
microelectronic circuits
Correction
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