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A microelectromechanical device having an improved beam suspension
A microelectromechanical device having an improved beam suspension
2002
Patrick C. Herbert
Jeffrey R. Annis
Jun J. Yao
W. L. Morris
Henric Larsson
Richard D. Harris
Robert J. Kretschmann
Keywords:
Suspension (vehicle)
Beam (structure)
Composite material
Materials science
Optoelectronics
Correction
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