A pattern-deviation photon scanning technique for precise measurement of internal component locations

Abstract A pattern-deviation photon scanning technique that takes advantage of a priori information to precisely measure the positions of components inside a sample is developed. The technique involves scanning the sample in steps through a photon beam and collecting transmission responses with one or more detectors. Theoretical and experimental investigations of a chamber whose walls obscure visual observation of the locations of wires in an array embedded in a uniform fill material are described. Mathematical models of transmission response are developed and fit to experimental results in order to determine individual wire positions. Analysis of results indicates a sensitivity to misalignment of a single wire and demonstrates an ability to measure individual wire positions to within ±50 μm , equivalent to a standard deviation of about 17 μm.