Effects of monitoring accuracy on thin film filter performance
2001
Analytical techniques were applied for analysis of monitor data from many deposition runs to measure the end-pointing accuracy. Results show that the magnitude of transmission ripple in the filter pass-band spectrum bears a strong correlation to the standard deviation of the endpointing from the target.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI