Peculiarities of measurements in scanning electrical-conductivity microscopy
2012
Functional capabilities of the scanning electrical-conductivity microscopy (SECM) in determining the electrical conductivity of nano-sized elements, studying the nanostructure of conductive coating materials, and evaluating the conductivity of nano-objects are described. The applicability of the SECM to finding imperfections in the multilevel metallization of integrated circuits with a nano-sized topology is demonstrated.
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