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The use of Nanocomposite Materials for High Refractive Index Immersion Lithography
The use of Nanocomposite Materials for High Refractive Index Immersion Lithography
2008
Paul Zimmerman
Bryan J. Rice
Robert Rodriguez
Micahel F. Zettel
Markos Trikeriotis
Dongyan Wang
Yi Yi
Woo Jin Bae
Christopher K. Ober
Emanuel Giannelis
Keywords:
Nanoparticle
Refractive index
Nanocomposite
Immersion lithography
High-refractive-index polymer
Resist
Optics
Materials science
Photochemistry
Optoelectronics
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