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FABRICATION OF SILICON SPHERICAL MICROCAVITY BY LASER HEATING ON CHIP
FABRICATION OF SILICON SPHERICAL MICROCAVITY BY LASER HEATING ON CHIP
2017
Hailong Han
He Li
Yi Zou
Xiaoping Liu
Keywords:
Laser
Chip
Hybrid silicon laser
Electronic engineering
Optoelectronics
Silicon
Materials science
laser heating
Fabrication
Correction
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