Application of ultrasonic sprayed zirconium oxide dielectric in zinc tin oxide-based thin film transistor

Estonian Ministry of Education and Research project IUT194; UID/CTM/50025/2019; European Union through the European Regional Development Fund project TK141 “Advanced materials and high-technology devices for energy recuperation systems”; and European Institute of Innovation and Technology (EIT RawMaterials, Horizon 2020) Supersmart, Scale-Up of Printed Electronics, Grant Agreement 17161. “DoRa Plus Action 1”. Grant SFRH/BD/116047/2016.