Direct ion-beam deposition of Ag nanoparticles using a solid-state silver ion source
2020
Abstract Ion beam technology has shown itself worth to be an efficient method to produce nanoparticles embedded in dielectrics for photoelectronic devices. However, direct ion-beam deposition of nanoparticles (NPs) on the surface of dielectrics is rarely reported because the conventional metal ion source runs into difficulties to generate low energy (
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