Arclöschverfahren to extinguish arcs in a plasma chamber of a plasma system and power supply system

Arcloschverfahren to extinction of arcs in a plasma chamber (6) of a plasma system (1) comprising the steps of: a. Generating a power during plasma operation to generate a plasma in the plasma chamber (6) and for carrying out a plasma processing process using the plasma generated by an analog signal is generated by a digital-to-analog converter (41) an amplifier path (31, 32 is supplied) and amplified therein; b. Control of the plasma system (1) for the occurrence of an arc by arc detection; c. upon detection of an arc in step b .: Driving the digital-to-analog converter (41) by the arc detection, such that an analog output of the digital-to-analog converter (41) is changed.