The Preparation of ITO nano-powder by Arc plasma method

ITO nanopowder of the high purity was prepared by self-desigred fabricated arc plasma apparatus. The crystal structure, morphology, particle size distribution and purity were characterized by X-ray diffraction(XRD) , transmission electron microscopy(TEM) and Inductively Coupled Plasma Action Emission Spectrum(ICP-AES). Effects of parameters on output was studied. The results show that The results revealed that the average size of ITO powder is in the range from 30 to 80nm and the purity is 99.994%, powders have square crystal structures with higher dispersion and purity. This new technology can use simple process to produce high quality boron powders, and is feasible for industrial production.