Quantitative TEM analysis on atomic configuration of half-Heusler compound

The site occupancies of Zr and Hf atoms in a high performance thermoelectric material Ti 0.5 (Zr 0.5 Hf 0.5 ) 0.5 NiSn 0.998 Sb 0.00 2 with the half-Heusler structure were clarified by a quantitative TEM analysis. This TEM technique is called the method for determining atomic locations by channeling enhanced microanalysis (ALCHEMI). In this technique, the dependence of the characteristic X-ray intensities on the electron diffraction conditions was measured in TEM. As a result, the distribution fractions of Zr atoms on Ti, Ni and Sn sites were shown to be 0.72, 0.17 and 0.11, respectively. Those of Hf atoms were shown to be 0.73, 0.12 and 0.15, respectively