Old Web
English
Sign In
Acemap
>
Paper
>
Stress evolution during growth of AlN templates on c-Al2O3 substrates by plasma-assisted molecular beam epitaxy
Stress evolution during growth of AlN templates on c-Al2O3 substrates by plasma-assisted molecular beam epitaxy
2019
O A Koshelev
D. V. Nechaev
Pavel N. Brunkov
V. V. Ratnikov
S. I. Troshkov
Stefan Ivanov
V. N. Jmerik
Keywords:
Optoelectronics
Molecular beam epitaxy
Template
Materials science
Plasma
stress evolution
Correction
Source
Cite
Save
Machine Reading By IdeaReader
14
References
0
Citations
NaN
KQI
[]