Departing from the electro-optic crystal z-axis angle measurement apparatus and measurement method
2015
The present invention discloses a measurement apparatus and measurement method of an electro-off angle of the crystal Z-axis, comprising: an optical path sequentially placed by a laser (101), a microscope objective (102), a pinhole (103), an adjustable stop (104) , a collimating lens (105), a polarizer (106), a mirror (107), beam splitting cube (108), light screen (109), a lens (110), the test crystal (111), two lenses ( 112), an analyzer (113), an imaging lens (114), the detector (115) and a computer processing system (116); wherein the polarizer (106) and the analyzer (113) perpendicular to the polarization direction, a lens (110), and two lenses (112) strictly conjugate, splitting cube (108), a mirror (107), the test crystal (111) and the light screen (109) consisting of a Michelson interferometer system. By implementing precise positioning using the crystal Michelson interferometer principle, using image matching algorithm dew point of the optical axis center calculation, the completion of electro-optical crystal Z-axis deviation angle measurement precision. Compared to other methods and apparatus having high measurement accuracy, the measurement method is simple, small measurement error and measurement system good repeatability.
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