Measurement of Diffusion Coefficient of CF2 Radical in DC Pulsed CF4/H2 Discharge Plasma.

Laser-induced fluorescence has been used to measure the CF2 radical ground-state densities after extinction of DC pulsed CF4/H2 discharge plasma. From the measurement, the CF2 radical was shown to be removed mainly by a diffusion process. Its diffusion coefficients are found to be D=430 cm2Torrs-1 in H2 and D=65 cm2Torrs-1 in CF4 at room temperature.