X-Ray Scattering Of Superpolished Flat Mirror Samples

X-ray scattering measurements of flat mirror samples taken with moderate (0.5 arcmin) and high (2.5 arc sec) angular resolution are reported. The measurements cover scatter angles ranging from a few arc seconds to ≈ 1 degree. By using standard scattering theories micro-roughness values are derived and spatial wavelength distributions inherent to the mirror surface are discussed.© (1982) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.