Estimation of proximity effect of polyethyleneglycol at e-beam polymerization for realization of nanoscale bioactive hydrogels

Ability of applying of electron scanning microscope for production of nanoscale bioactive structures by means of e-beam polymerization of polyethyleneglycol, placed on the silicon substrate. Resolution capability of gel structure depends on proximity effect of an electron beam. And this effect must be analyzed. For calculation of resolution capability computations of proximity effect through analytical model of Boltzmann kinetic equation, joining small-angle and diffuse approximations.