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Electric current for SiC x N y O z thin film formation rate by room temperature PECVD
Electric current for SiC x N y O z thin film formation rate by room temperature PECVD
2019
Toru Watanabe
Kenta Hori
Hitoshi Habuka
Keywords:
Optoelectronics
Electric current
Plasma-enhanced chemical vapor deposition
Thin film
Materials science
formation rate
Correction
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