Polishing solution stirring device and method

The invention provides a polishing solution stirring device comprising the following structures: a mixing tank used for containing polishing solution, and the bottom of the mixing tank is provided with a lower discharge port allowing liquid to flow; a magnetic stirring device comprising a magnetic stirrer fixed outside the mixing tank and a magnetic stirring rotor fixed in the mixing tank; a diaphragm pump with a liquid inlet connecting with the lower discharge port on the bottom of the mixing tank; a chemically mechanical polishing device connected with a liquid outlet of the diaphragm pump, and the mixed polishing solution in the mixing tank is conducted into the chemically mechanical polishing device through the diaphragm pump. The invention also provides a polishing solution stirring method; the method and device can prevent pollution caused by direct mechanical stirring, and can enhance polishing solution stirring effect.