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Properties of Amorphous Silicon Prepared by Using Intermediate Species SiF2 and H2 Gas Mixture
Properties of Amorphous Silicon Prepared by Using Intermediate Species SiF2 and H2 Gas Mixture
1984
Hideki Matsumura
Takashi Uesugi
Hisanori Ihara
Keywords:
Amorphous silicon
Nanotechnology
Materials science
Inorganic chemistry
Chemical engineering
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