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Deposition and characterization of amorphous carbon thin film by thermal CVD
Deposition and characterization of amorphous carbon thin film by thermal CVD
2020
Dayana Kamaruzaman
Muhammad Aliff Rosly
Ishak Annuar
Nurfadzilah Ahmad
Mohamad Rusop Mahmood
Keywords:
thermal cvd
Deposition (law)
Materials science
Amorphous carbon
Thin film
Chemical engineering
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