Ion implantation machine vertical direction ion beam angle measurement and control system and measurement method

The invention discloses an ion implantation machine vertical-direction ion beam angle measurement and control system and a measurement method. The measurement and control system comprises a Faraday cup, the Faraday cup is fixedly connected with one end of a fixing rod, the other end of the fixing rod is fixedly connected with a connecting rod perpendicular to the fixing rod, and the connecting rod is connected with a transmission device which can drive the connecting rod to axially rotate; the transmission device is connected with an output shaft of a drive motor; a rotary encoder used for measuring the included angle between the fixing rod and the horizontal plane is installed at the joint of the fixing rod and the connecting rod; the drive motor and the rotary encoder are electrically connected with a motion controller; and the motion controller is electrically connected with the Faraday cup through a real-time beam measurement controller. The measurement and control system of the invention is simple in structure and reliable in measurement; and the method of the invention can be used for accurately detecting the beam angle of an ion beam of an ion implantation machine on the vertical plane so as to ensure that the implantation angle of an ion beam implanted in a work piece is accurate, measurable and controllable.