Laser micromachining for Ag ion exchanged glasses

Machining properties of Ag containing glasses (ACG) using KrF excimer laser and femtosecond laser are reported. Ag ions in the ACG are effective to prevent cracking and chipping during the laser machining. A 4x4 hole array fabricated by KrF excimer laser onto an ACG has good uniformity of hole diameter, d(ave) equals 129.9um and (sigma) equals 0.8um. V- and U- grooves are fabricated on ACG using a Ti:Al 2 O 3 laser irradiation. The cross- sectional shape is controlled by Ag ion concentration in ACG.