Preparation of YbBaCuO Film on Various Substrates by Chemical Vapor Deposition at 650°C

High Tc YbBaCuO film(Tc,0 gt 80K) was successfully prepared on various substrates by CVD method using molecular oxygen as an oxidant. The deposited 123 phase showed c-axis oriented structure with a large c-axis lattice parameter with c = 11.706 ~ 11.826A. It was observed that the formation of 123 phase accompanied 132 phase as well as BaCuO and CuO. It is very noticeable that Yb2O3 was also deposited with 123 phase in YbBaCuO system.