Metal Organic Chemical Vapor Deposition of High‐Temperature Superconducting Y‐Ba‐Cu‐O Films

The authors have deposited high-temperature superconducting films of Y-Ba-Cu-O on yttria-stabalized zirconia (YSZ) and BaF{sub 2}/YSZ by metal organic chemical vapor deposition technique. Deposition was carried out under a low-pressure (5 torr) ambient with substrate temperature of 780{degrees}C. The x-ray diffraction (XRD) of the as-deposited films on YSZ (100) showed c-axis and b-axis orientations, as well as a certain amount of impurity peaks. The temperature dependence of these films exhibited an onset temperature of 90K and a zero resistance at 50 K. A significant improvement in the transition temperature width was observed for the as-deposited films on BaF{sub 2}/YSZ substrates with onset temperature of 90K and falling to zero at 80 K. The XRD results of these films show the presence of c- as well as a- and b-axes but with considerably reduced impurity phase.