Operation-routing sequence of production of the radiation-hardened microcircuits of the structured array MH2XA010 for multichannel sensor systems

The article considers the features of the modernized technological process of production of the new BiJFETs radiation-hardened microcircuits of the analog master slice array (AGAMC-2.1) and configurable structured array crystals (CSA) on n-p-n-transistors with the cut-off frequency more than 2,2 GHz, on p-n-p transistors with the cut-off frequency more than 1,5 GHz and on resistors, produced on the low-ohmic semiconductor layer. The brief information about the new microcircuits of AGAMC-2.1 and CSA MH2XA010 is given, on the base of which a wide range of semispecialized microelectronic products can be designed for the analog processors and multichannel converters of the sensor signal of different application. The production of the concrete semispecialized microcircuits is provided due to the creation of conductors of the elements of CSA, which can be produced by the core enterprises.