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A Study on the AA/STI Corner Shape Impact on Narrow Width MOSFET Idsat/Ioff Performance for 28nm Technology Node
A Study on the AA/STI Corner Shape Impact on Narrow Width MOSFET Idsat/Ioff Performance for 28nm Technology Node
2013
Yuejiao Pu
Xuejie Shi
Jeonggi Kim
Shaofeng Yu
Keywords:
MOSFET
Electronic engineering
Engineering
Engineering physics
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