Wideband visible wavelength range MEMS Fabry‐Perot Tunable Filter with Ag alloy mirror

In this paper we report the structure and the fabrication process of the new microelectromechanical systems (MEMS) Fabry-Perot Tunable Filter (FPTF) device with Ag alloy mirror which is tunable in the wide wavelength range of visible light. The device has a very simple structure, which consists of two substrates bonded by a novel bonding technology, polymer films, and inert gas plasma treatment. We confirmed that the wavelength of the first-order transmission peak of the fabricated device can be adjusted to a range of 400 to 700 nm by applying the different DC voltage. Our MEMS FPTF device successfully operates in the wide wavelength range of visible light and shows good agreement with simulation results. © 2013 Wiley Periodicals, Inc. Electron Comm Jpn, 96(3): 17–23, 2013; Published online in Wiley Online Library (wileyonlinelibrary.com). DOI 10.1002/ecj.11451.