High efficiency and high power density VCSEL chip for 3D sensing

Vertical cavity surface emitting laser (VCSEL) have recently emerged as highly promising electro optic device in 3D sensing and Lidar due to excellent properties such as high reliability, attractive high power performance, design flexibility and low manufacturing costs. To become a dominant player in serving the consumer electronics and driverless cars markets, we develop 6-inch VCSEL production line include device design, epitaxial growth and device-fabrication. By optimizing the device structure and manufacturing process, high power and high efficiency VCSEL devices are developed. We demonstrate that the maximum power conversion efficiency of the triple active regions VCSEL with 61.6%. In this paper, we will present you the evolution of VCSEL manufacturing technology and device characterization.