Noncontact optical mirror surface detecting system based on laser scanning method and detecting method thereof

2016 
A noncontact optical mirror surface detecting system based on a laser scanning method and a detecting method thereof belong to the field of optical measurement technology. The noncontact optical mirror surface detecting system and the detecting method thereof settle a problem of complicated structure of an existing detecting device. The noncontact optical mirror surface detecting system comprises a laser range finder, a two-dimensional translation stage and a vertical lifting stage. The two-dimensional translation stage comprises an X-axis movement device and a Y-axis movement device. The vertical lift stage is mounted on the Y-axis movement device. The two-dimensional translation stage is electrically connected with a translation stage controller. The vertical lifting stage is electrically connected with a lifting stage controller. The translation stage controller and the lifting stage controller are electrically connected with an upper computer through a scheduling controller. The detecting method for the optical mirror surface comprises the steps of fixedly mounting a detected mirror surface on the noncontact optical mirror surface detecting system, performing grid scanning for obtaining a three-dimensional coordinate, substituting the three-dimensional coordinate into a curved surface equation and performing fitting for obtaining a three-dimensional coordinate equation of the detected mirror surface. The noncontact optical mirror surface detecting system based on the laser scanning method and the detecting method thereof have advantages of simple structure and low manufacture cost.
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