Trichlorosilane tail gas variable-pressure adsorption equipment and process thereof

The invention discloses trichlorosilane tail gas variable-pressure adsorption equipment, and a process thereof. The adsorption equipment comprises a resolution gas heat exchanger, wherein the resolution gas heat exchanger is provided with a raw material gas inlet pipe and a gas outlet pipe; and the gas outlet pipe is connected with an adsorption device. The adsorption process comprises the steps that: the raw material tail gas first enters the resolution gas heat exchanger to exchange heat, then enters a heater to be heated up to a temperature of 70+/-2 DEG C and finally enters the adsorption equipment to be absorbed; and after the adsorption, the purified hydrogen gas flows out of a purifying gas tube and is delivered to an HCL synthetic system to take part in HCL synthesis, and the resolution gas enters the resolution gas exchanger from a resolution gas tube to exchange heat and then enters a resolution gas buffer tank and is delivered to a trichlorosilane synthetic system to be recycled.