Optimizing Signal-to-Noise Ratio of SERS Ag Capped Si Nanopillars

A simple approach for mass-production of wafer-scale Ag capped Si SERS nanopillars is presented with emphasis on signal-to-noise ratio. Experimental findings suggest that the Ag NP substrates are strong candidates for obtaining a reliable SERS sensing at ultra-low concentrations. The fabrication process is simple, cost-effective, CMOS compatible and could be suitable for mass-production in standard IC foundries utilizing even larger Si carrier wafers. Figure 3. Representative SERS spectra and SEM images of the O2-plasma treated Ag NP arrays before, (a) (c), and after, (b) (d), exposure to 1 μL of 10 mM BPE in ethanol. Solvent drying pulls Ag NPs together forming nanoclusters of varying size. DTU Nanotech, Technical University of Denmark, Kgs. Lyngby, Denmark