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Heating equipment with carbon heating used to activate silicon and fabricate its solar cells
Heating equipment with carbon heating used to activate silicon and fabricate its solar cells
2018
Toshitaka Kikuchi
Takashi Sugawara
Takuma Uehara
Tomoyoshi Miyazaki
Go Kobayashi
Masahiko Hasumi
Toshiyuki Sameshima
Keywords:
Carbon
Microwave
Nanotechnology
Materials science
Silicon
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