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K33 複合単結晶材料基板の超精密平坦化加工プロセス技術(K3 CMPII)
K33 複合単結晶材料基板の超精密平坦化加工プロセス技術(K3 CMPII)
2011
sin'iti yosiura
ta inamori
tosirou toi
syuuhei kurokawa
osamu oonisi
tutomu yamazaki
Keywords:
Materials science
Chemical-mechanical planarization
Composite material
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