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Fabrication and Characterization of Smart Sliders with Integrated ZnO Thin-Film Sensors and Actuators
Fabrication and Characterization of Smart Sliders with Integrated ZnO Thin-Film Sensors and Actuators
2014
Xin Xia
Hejun Du
Yoke-Rung Wong
Yanhui Yuan
Keywords:
Actuator
Thin film
Nanotechnology
Fabrication
Materials science
thin film sensor
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