High Precision Local Electrical Probing: Potential and Limitations for the Analysis of Nanocontacts and Nanointerconnects

The variety of approaches for individual nanoscale devices is tremendous. In contrast however, comprehensive concepts toward electrically integrated and therefore functional devices are rare. The individual metallic contact interface represents one of the main challenges and high precision local electrical probing has the potential to increase efficiency in evaluating different approaches. To meet the involved requirements, we have established and being advancing an approach for nano-scale electrical probing at low temperatures by integrating scanned probe microscopic (SPM) technology with high resolution electron microscopy.