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P‐174: Piezoelectric Tuning Technology to Compensate for Variation in Resonant Frequency in a MEMS Mirror
P‐174: Piezoelectric Tuning Technology to Compensate for Variation in Resonant Frequency in a MEMS Mirror
2010
Takeshi Honda
Nobuyuki Takanashi
Osamu Ishibashi
Fujio Okumura
Keywords:
Optoelectronics
Piezoelectricity
Electronic engineering
Microelectromechanical systems
Engineering
Correction
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