Old Web
English
Sign In
Acemap
>
Paper
>
Wafer rotation effect on silicon epitaxial growth for minimal CVD reactor
Wafer rotation effect on silicon epitaxial growth for minimal CVD reactor
2020
Mana Otani
Atsuhiro Motomiya
Toshinori Takahashi
Mitsuko Muroi
Hitoshi Habuka
Shinichi Ikeda
Yuuki Ishida
Shiro Hara
Keywords:
Materials science
Optoelectronics
Rotation
Wafer
Silicon
Dichlorosilane
Epitaxy
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]