Old Web
English
Sign In
Acemap
>
Paper
>
Apparatus for producing a layer on the surface of at least one substrate by CVD
Apparatus for producing a layer on the surface of at least one substrate by CVD
1996
Roland Rupp
Johannes Dr Voelkl
Keywords:
Substrate (chemistry)
Composite material
Materials science
Chemical engineering
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]